Silicon nitride insulating rings& thermal shield are usually used in polysilicon deposition reactor(CVD). Silicon nitride have the advantages of excellent electrical insulation and high temperature resistance.
Compare to traditional Al2O3 material, the service life of silicon nitride can reach to more than 6 months (or 36 cycle) , it greatly reduce replacement cost, save workers’ operation time and improve synthesis benefit. Silicon nitride insulating rings& thermal shield have become one of the most cost-effective materials for use in polysilicon.
We provide customize silicon nitride insulating rings& thermal shield.